溶膠凝膠法製備摻氮P-型氧化鋅

MUSTIR > College of Engineering > Department of Mechanical Engineering > Research Projects in School > Item 987654321/625

Please use this identifier to cite or link to this item: http://120.105.36.38/ir/handle/987654321/625

Title:	溶膠凝膠法製備摻氮P-型氧化鋅
Authors:	王進安
Contributors:	機械工程系
Keywords:	溶膠凝膠法旋轉覆膜法氧化鋅
Date:	2011-12
Issue Date:	2012-04-24 15:28:24 (UTC+8)
Abstract:	本研究的目的是使用溶膠凝膠法來製備氧化鋅摻雜氮薄膜(NZO)。薄膜以旋轉塗覆方式沉積於(100)矽晶圓基板上，經高溫退火處理後，利用x-ray diffraction、SEM 與四點探針等分析方法來觀察薄膜之特性。實驗結果顯示，使用不同的溶劑與摻雜物濃度時，配置之溶液顏色會有透明無色與茶黃色的不同變化。氧化鋅薄膜在經過退火後，薄膜會沿著(100)方向生長。由載子濃度結果，可以判定氧化鋅摻氮薄膜為p-type 之薄膜。薄膜面電阻率為168.4(ohm/sq)。
Appears in Collections:	[Department of Mechanical Engineering] Research Projects in School

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