Minghsin University Institutional Repository:Item 987654321/257
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    Please use this identifier to cite or link to this item: http://120.105.36.38/ir/handle/987654321/257


    Title: 鎳鐵-氮化鋁多層薄膜介電特性研究
    Authors: 丁 逸
    Contributors: 人文社會科學學院自然科學教學中心
    Keywords: 鐵性材料，介電常數，多層薄膜。
    Date: 2008-12
    Issue Date: 2010-03-30 15:46:43 (UTC+8)
    Abstract: 本研究係藉由離子束濺鍍儀製作多層鐵性材料(鎳、鐵)薄膜和介電材料(氮化鋁)的複合薄膜樣品，此複合薄膜材料的介電常數大小與鎳鐵層的厚度關係，在頻率40Hz到30MHz之間被精密量測。在本研究中，研究資料顯示多層薄膜(AlN/NiFe/AlN)的介電常數大小受奈米尺度鎳鐵層的厚度影響而達到一極值，我們發現奈米級厚度(1~10nm)的鎳鐵層使得鎳鐵-氮化鋁的複合薄膜之介電常數達到60。
    Appears in Collections:[The Teaching Center of Natural Science] Research Projects in School

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